Abhishekkumar Thakur

FAQ About Abhishekkumar Thakur

• What is Abhishekkumar Thakur's address?

  Abhishekkumar Thakur is located at
  Großkrotzenburg, Hesse, Germany

• What is Abhishekkumar Thakur's job title?

  Abhishekkumar Thakur is a
  Atomic layer processes, for example, atomic layer deposition (ALD) and atomic layer etching (ALE) have always fascinated me by their inherent angström level deposition/etch precision. The cyclic growth of material with exceptional conformality based on sequential, self-limiting surface half-reactions has fostered the adoption of ALD as an indispensable process step in the current FinFET (3D transistors) production line at the leading edge foundries. Apart from spacer based self-aligned multiple patterning (SAxP) in the front-end-of-line and Cu diffusion barrier film stack in the back-end-of-line interconnect technology in logic and memory applications, ALD has been adopted in HVM in many industries: for example, moisture permeation barrier in organic ligh-emitting displays (OLEDs), thin-film batteries, photovoltaics (PERC solar cells), ferrolectric memory devices, corrosion resistant coatings on implant devices in medical and healthcare, particle coatings in drug delivery, wear resistant part-coatings, decorative coatings, powder coatings in ceramic industry etc. While ALD debuted in high volume manufacturing (HVM) at 90nm DRAM node for the high-k capacitor dielectric (Samsung in 2004) and at 45nm node in deposition of high-k dielectric (HfO2) for gate stack (Intel in 2007), ALE is in focus as the next generations etch technology beyond 16/14nm nodes. ALE enables material removal to form sub 20 Å wide trenches, fins in FinFET transistor architecture or nanowires/nanosheets in gate-all-around (GAA) transistor architecture without damaging other parts of the nanostructure. The semiconductor industry is, therefore, pushing for a joint ALD and ALE processing technology that could be an indispensable process combination for SAxP (or the so-called pitch splitting). Buhler

• What industry does Abhishekkumar Thakur currently work in?

  Abhishekkumar Thakur currently works in the
  Buhler

• What is Abhishekkumar Thakur's area of expertise?

  Abhishekkumar Thakur specializes in
  Atomic layer processes, for example, atomic layer deposition (ALD) and atomic layer etching (ALE) have always fascinated me by their inherent angström level deposition/etch precision. The cyclic growth of material with exceptional conformality based on sequential, self-limiting surface half-reactions has fostered the adoption of ALD as an indispensable process step in the current FinFET (3D transistors) production line at the leading edge foundries. Apart from spacer based self-aligned multiple patterning (SAxP) in the front-end-of-line and Cu diffusion barrier film stack in the back-end-of-line interconnect technology in logic and memory applications, ALD has been adopted in HVM in many industries: for example, moisture permeation barrier in organic ligh-emitting displays (OLEDs), thin-film batteries, photovoltaics (PERC solar cells), ferrolectric memory devices, corrosion resistant coatings on implant devices in medical and healthcare, particle coatings in drug delivery, wear resistant part-coatings, decorative coatings, powder coatings in ceramic industry etc. While ALD debuted in high volume manufacturing (HVM) at 90nm DRAM node for the high-k capacitor dielectric (Samsung in 2004) and at 45nm node in deposition of high-k dielectric (HfO2) for gate stack (Intel in 2007), ALE is in focus as the next generations etch technology beyond 16/14nm nodes. ALE enables material removal to form sub 20 Å wide trenches, fins in FinFET transistor architecture or nanowires/nanosheets in gate-all-around (GAA) transistor architecture without damaging other parts of the nanostructure. The semiconductor industry is, therefore, pushing for a joint ALD and ALE processing technology that could be an indispensable process combination for SAxP (or the so-called pitch splitting).

• Which languages does Abhishekkumar Thakur speak? 

  Abhishekkumar Thakur speaks the following languages:
  No languages available.

• Which industries has Abhishekkumar Thakur previously worked in?   

  Abhishekkumar Thakur has prior experience in the following industries:
  Plasway , Fraunhofer Institute For Ceramic Technologies And Systems Ikts , Technische Universitat Dresden , Clean Room Institute Fur Halbleiter Und Mikrosystemtechnik Tu Dresden , Technische Universitat Dresden , Hitachi Hi Rel Power Electronics

• What is Abhishekkumar Thakur’s work experience?  

  Abhishekkumar Thakur has the following professional experience:
  Buhler , Plasway , Fraunhofer Institute For Ceramic Technologies And Systems Ikts , Technische Universitat Dresden , Clean Room Institute Fur Halbleiter Und Mikrosystemtechnik Tu Dresden , Technische Universitat Dresden , Hitachi Hi Rel Power Electronics .

• How can I find Abhishekkumar Thakur on LinkedIn?  

  You can view Abhishekkumar Thakur’s
  LinkedIn profile at LinkedIn URL.

• What are Abhishekkumar Thakur’s work email addresses?  

  Abhishekkumar Thakur’s work email addresses are
  [email protected] .

• What company does Abhishekkumar Thakur work for?  

  Abhishekkumar Thakur works at
  Buhler